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NEW Hitachi SAM SFC1482FPFMC-4VLN24 Ar 20 SLM Mass Flow Controller (MFC), Novellus PN: 22-188118-00
Comes with what you see in the pictures. If you don\'t see it, you probably won\'t get it.
Specifications are from Hitachi Metals and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
This MFC is brand-new, old stock from surplus Novellus inventory.
The Unit\'s Serial Number Tag Reads:
Model Number: FC1482FPFMC-4VLN24
Serial Number: 0F1231
Device No: 00
Gas: Ar
Calibration Factor: 1.399
Flow Rate: 20 SLM
SEMI Gas Code: 4
Part Number: 22-188118-00
Novellus Part Number: 22-188118-00
Breakdown by Part Number:
Series: 148
Flow Range: 20 SLM
Options: None
Seal Material: Metal
Operation: Normally Closed
Fittings: 1/4\" HMJ (UJR) male
Mounting Position: Vertical Inlet Down
Connector: D-sub 9-pins (Valve open/closed-connected to ±15 VDC type)
Mounting Position: Not specified
Connection Valves: None
Special - Sensor Type: Ni sensor
Electropolished: Yes
Face-to-Face Dimensions: 124 mm
Digital Communication: digital control method is applied.
Quick response
High accuracy by digital multi-point calibration.
Face-to-face dimensions
Monitoring of operation using digital interface is possible.
Simple valve Conventional
Standard Full Scale Flow Rate (N2 Equivalent): 20 SLM
Valve Operation: Normally closed
Operation Pressure:
Inlet: 0.05 - 0.3 MPa (Gauge)
Outlet: Vacuum-atmospheric pressure
Flow Control Range: 2 - 100% of full scale
Accuracy: ±0.5% of full scale
Response Time: Less than 1 sec to full scale (within ±2%), Less than 1.5 sec to any set-point (within ±2%)
Proof Pressure: 1.0 MPa (Gauge)
Temperature:
Operation: 5 to 50°C
Accuracy Guaranteed: 15 to 35°C
Baking: 80°C
Leak Integrity - Metal Seal: Less than 1 x 10-11 Pa x m3/s (He)
Principle Materials:
Valve Seat: SUS316L
Diaphragm: YET101 (Ni-Co alloy)
Sensor: Ni
Set-Point Input: 0.1 to 5 VDC (absolute maximum rating ±15 VDC)
Flow Signal Output: 0 to 5 VDC (max: +15 VDC, min: -15 VDC)
Power Supply: +15 VDC (±4%) 100 mA (max. 120 mA), -15 VDC (±4%) 100 mA (max. 120 mA)
Finish of Gas Wetted Areas: Special electropolishing
Connection: D-subminiature (9 pin)
Fittings: 1/4\" HMJ (UJR) male
Notes:
1: These specifications can be guaranteed in Hitachi Metals\' standard measurement condition. They may not be guaranteed in other measurement condition.For Domestic Customers: Packaging, handling, and order processing included in shipping in all domestic shipments as quoted by the shipping calculator. For International Customers there is a $10.00 minimum for packaging, handling, and order processing. International shipping to be determined by destination.
Prior to shipment I will need to know the following information (filled out on a form that I will send you) for International Customers or Packages/Freight being Forwarded internationally. International customers may also be subject to a freight forwarder form if applicable.:
(1) Are you the end-user of this item?
(2) If you are not the ultimate end-user of the item, please state the ultimate end user\'s name.
(3) What is the ultimate country destination?
02/28/17
